KOH Etch Rate Calculator

Calculates the etch rate of major silicon crystal planes and SiO2 in KOH solution.
includes effects of Isopropyl Alcohol in solution and Boron doping in the silicon

Where do I start Where do I start?


OPTIONS:What do these options mean?
IPA (saturated)

Substrate has heavy p-type doping
Active Dopant Concentration :
per cc

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Calculator Code by Maria Pace ©2013-2014. All Rights Reserved.